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Machined Parts |
Surface treatments such
as pyrolytic coatings should only be done on finished,
machined parts. Machining after treatment will expose the graphite substrate.
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Purification |
| Suffix |
-2 for semiconductor grades that end in the
number 1; and -1 for other grades (industrial) |
| Effect |
Reduces impurities to 5 ppm or less as determined
by ash analysis |
| Summary |
Unpurified POCO graphites have typical impurity
levels of about 1000 ppm, but they can have
up to 3000 ppm. The dominant impurity is vanadium,
with some iron, aluminum, calcium, nickel,
titanium, and silicon. Gaseous impurities do
not show up in ash tests, and may be present
in small amounts in purified materials |
| Physical Properties |
Not affected |
| Application |
Recommended after final machining |
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Densification |
| Suffix |
-3 for semiconductor grades
that end in the number 1; and -1 for other
grades (industrial |
| Effect |
Reduces open porosity by 80% |
| Summary |
Graphite has tiny voids (pores),
which may link to the surface (open porosity),
or be isolated (closed porosity). Densification
partially fills the open pores with pure carbon,
reducing the average pore size and open porosity.
This produces a graphite with very low permeability |
| Physical Properties |
Not affected |
| Application |
Can be applied to bulk material |
| Does not affect dimensions |
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Pyrolytic Treatment |
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The treatment completely seals the surface of the graphite and reduces
particle generation in demanding environments. These materials resist attack by acids.
POCO produces a number of pyrolytic carbon treated materials marketed
under different trade names for semiconductor applications.
Each of these different materials is targeted at specific applications.
For industrial application, POCO produces a pyrolytic carbon treatment on AXF-5Q
and this material is designated as AXF-5QPyC. |
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Additional Information | | Entegris Entegris welcomes POCO to the family. | | How to Buy POCO products are available through a variety of outlets. | | Quality Poco Graphite is committed to providing the highest quality graphite materials to its customers. | | Literature Download information about specific POCO products or Material Safety Data Sheets (MSDS). | | Contacts Get address, phone, fax and email information for POCO and its Distributors. | | Careers Note that you will be redirected to our parent company website, entegris.com, to search available positions. | | Training EDM Training Classes Free to the Industry |
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